DEFECT DOCUMENTATION
Easy point-and-click registration of visually discovered macro defects.
Transparent wafer feature.
Software add-on to manual macro station.
Coordinate export in KLA format.

Features
Optional add-on for the HSEB macro station.
Automated documentation of macro defects under precisely the same viewing conditions as of the operator.
Independent of wafer position (tilt angle, rotation), precisely calculated coordinates are determined.
Transparent wafer festure allows to see already discovered defects at the reverse wafer side.
KLARF export to enable convenient macro defect review, for example on a microscope; file format supports back side information.
Manual defect classification by means of customer-defined defect code list.